vapor delivery systems

Features & Benefits:

Inert, toxic, hazardous materials; semi-auto or fully automatic PLC-based control with touchscreen interface
Complete startup purge routines to ensure clean, safe delivery of UHP saturated vapor
1-, 5-, 10- or 20-liter bubbler with integrated over-pressure relief valve for safety
Linear-level sensor for realtime level indication
RTD temperature probe in bubbler vessel for accurate temperature readings
Sparge diffuser for maximum vapor saturation
Optional integrated chiller for temperature control
Facilities connection at top or bottom of cabinet and process and carrier gas connections at top, bottom, left or right of cabinet for versatile installations
Bubbler Online and OK to Fill interface signals
Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
Modular construction for improved service and maintenance
SEMI-S2 compliant

Vapor Delivery System

AGEM Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance. The standalone system includes the bubbler vessel, optional chiller and system controller in a small footprint. The facilities connections, carrier gas and process lines can be configured from multiple sides to fit into tight space requirements.

The Vapor Delivery System is designed to distribute chemical vapor via a carrier gas. The bubbler vessel is filled with the liquid chemical. Feedback from an active linear level sensor is used to maintain the vessel at the configurable set point level. The carrier gas is bubbled through the vessel using a sparge diffuser to maximize the vapor saturation. A temperature probe and optional integrated chiller maintain the chemical at a user configured set point to maximize process control.

Vapor Delivery Enclosure Specifications

Measures 16” W x 16” D x 74.25” H with single 3” exhaust
Superior construction – 11-gauge cold-rolled steel, polyester powder coating for superior corrosion resistance, all-welded inner enclosure for bubbler system
Cabinet louvers eliminate dead or trapped-gas areas
Rear exhaust plenum and chase
Isolated electrical, chiller and gas sections
Doors – Enclosure gasket with full-length hinge for years of trouble-free service
Exhaust sensor – Alarm can initiate chemical shutdown, audible alarm or remote alarm as needed
Sprinkler head – U.L. approved
Fire sensor – Rate of rise

Vapor Delivery Options

Bubbler vessel – 1, 5, 10 or 20 litersIntegrated chiller
Litres Integrated chiller
Reclaim options – Manual drain, manual remote drain, drain reclaim line
Carrier gas stick with optional incoming pressure gauge or transmitter, bypass, and emergency shutoff (ESO) valve

vapor delivery systems

Features & Benefits: