liquid delivery systems

Features & Benefits:

Complete startup, canister and line purge routines with proven safe performance
Adjustable shelf for different canister options up to 20 liter
Semi-compliant system and controller

Liquid Delivery System

The AGEM Solutions’ Liquid Delivery System is a chemical distribution system designed to maximize efficiency and performance. The stand-alone system includes redundant panels with auto-crossover capability for increased uptime > 99.9%. The small footprint with large process capacity is designed to distribute liquid chemical via a push gas. On day-tank-type systems, the liquid level has a linear indication for consistent level monitoring. High-precision scale options offer grams per run for tight process control. PLC components are consistent with our line of gas cabinets and VMB controllers to minimize spares inventory. The LDS is a fully automatic system for maximum safe operation and performance.

Cabinet Construction

Superior construction using 11-gauge coldrolled steel, a polyester powder coating for superior corrosion resistance and an all-welded inner enclosure for canister containment
Cabinet louvers eliminate dead or trapped vapor areas
Doors – Enclosure gasket and reliable hinges for years of trouble-free service
Exhaust sensor – Alarm can initiate chemical shutdown or offer warning with non-shutdown audible alarm or remote alarm as needed
Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
Fire sensor, ROR or UV/IR, sprinkler head
110% canister leak containment

Product Options

Push-gas regulation for consistent delivery pressure
Multiple outlet configurations with tool interface
Vacuum pump
De-gas units
High-flow systems
Day tank for continued process during canister change
Linear-level sensor in day tank for real-time level indication
Auto-crossover systems for system redundancy and increased uptime

High-precision scales for grams-per-run information
Automatic canister refill from bulk supply canisters
Controller-redundant power supplies, solenoid valves or PLC
PLC hold last state Touch-Screen Display
10.4” full-color display for high visibility
Provides a graphical display of the entire panel
Shows valve status during normal operation, purging and manual modes

liquid delivery systems

Features & Benefits: